Opacity effects on laser-produced plasma radiation sources
نویسندگان
چکیده
منابع مشابه
Radiation sources based on laser-plasma interactions.
Plasma waves excited by intense laser beams can be harnessed to produce femtosecond duration bunches of electrons with relativistic energies. The very large electrostatic forces of plasma density wakes trailing behind an intense laser pulse provide field potentials capable of accelerating charged particles to high energies over very short distances, as high as 1GeV in a few millimetres. The sho...
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Extreme ultraviolet (EUV) lithography devices that use laser produced plasma (LPP), discharge produced plasma (DPP), and hybrid devices need to be optimized to achieve sufficient brightness with minimum debris generation to support the throughput requirements of High-Volume Manufacturing (HVM) lithography exposure tools with long lifetime. Source performance, debris mitigation, and reflector sy...
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Opacity effects on extreme ultraviolet (EUV) emission from laser-produced tin (Sn) plasma have been experimentally investigated. An absorption spectrum of a uniform Sn plasma generated by thermal x rays has been measured in the EUV range (9-19 nm wavelength) for the first time. Experimental results indicate that control of the optical depth of the laser-produced Sn plasma is essential for obtai...
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Tin, lithium, and xenon laser-produced plasmas are attractive candidates as light sources for extreme ultraviolet lithography (EUVL). Simulation of the dynamics and spectral properties of plasmas created in EUVL experiments plays a crucial role in analyzing and interpreting experimental measurements, and in optimizing the 13.5 nm radiation from the plasma source. Developing a good understanding...
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distributions from laser-produced Sn plasma Russell A. Burdt, Yezheng Tao, Mark S. Tillack, Sam Yuspeh, Nek M. Shaikh, Eli Flaxer, and Farrokh Najmabadi Center for Energy Research, University of California San Diego, La Jolla, California 92093, USA Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, USA AFEKA Tel-Aviv Academic College of Engineer...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2019
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.5111720